|СОЛВЕР Nano||AFM - Raman - SNOM||Modular AFM||Automated AFM||Practical AFM||Practical AFM|
SPM principle: Constant Force mode
Size: 18x28x2 um
SPM principle: Scanning Capacitance Microscopy
Size: 18x28 um
Name: Test structure
MDT-file: test_structure.mdt (147.77 Kb)
Test structure on the base of SiO2 stripes height 0.1µm grating on the silicon wafer. Ion implantation by boron with E=100 keV, annealing and SiO2 layer etching was employed.
On the resulting structure following images were obtained: Fig. 1 - Topography of test structure (contact mode AFM), Fig. 2. - Contact SCM image of the same area.
|« Quantum dots||Integrated circuit »|